摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor built-in piezo-resonator with high accuracy excellent in productivity which can match to a target oscillation frequency, even if the variations of the oscillation frequency of the capacitor built-in piezo-resonator occur caused by the variations of materials and the variations of processes during manufacturing a laminated body. SOLUTION: An adjustment window which penetrates a dielectric layer is formed to the dielectric layer at least located in the lowermost layer of the laminated body. A first internal electrode and a second internal electrode or a third internal electrode are exposed to the inside of the adjustment window. The adjustment of the oscillation frequency of the capacitor built-in piezo-resonator is executed by removing a part of the exposed electrodes. COPYRIGHT: (C)2005,JPO&NCIPI
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