摘要 |
PROBLEM TO BE SOLVED: To solve problems that because an electron beam recording apparatus is greatly influenced by changes in the magnetic field around the apparatus, mechanical vibration of the apparatus, acoustic noise, electric noise or the like, the irradiation position of the electron beam with respect to the master disk varies, however, changes in the irradiation position are extremely difficult to detect during recording in the master disk. SOLUTION: The electron beam recording apparatus is equipped with an electron optical system to irradiate the master disk of an information recording medium with an electron beam; and a detecting unit for the irradiation position of an electron beam to detect the irradiation position of the electron beam in the electron optical system while irradiating the master disk with the electron beam in the electron optical system. COPYRIGHT: (C)2005,JPO&NCIPI
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