| 摘要 |
Photo reticles (110) are formed comprising a first and second printable features (130), (140) which are connected by a channel assist feature (150). The size of the channel assist feature is such that the channel assist feature will not substantially print on photoresist that is exposed using the reticle. Third printable features (120) can be placed at distances WD from the channel assist feature (150). The channel assist feature will assist in the formation of the third printable feature (120).
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