| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar cell capable of simply and precisely forming a microscopic and uniform texture structure on the surface of a silicon semiconductor substrate with a few process, and capable of manufacturing the solar cell superior to a power generation efficiency by decreasing a reflectivity of the solar light at a high manufacturing yield and a lower cost by the use of the silicon semiconductor substrate. <P>SOLUTION: The method for manufacturing the solar cell provided with the silicon semiconductor substrate having the texture surface comprises the steps of forming a silicide layer 102 on the surface of a silicon semiconductor substrate 100, and forming the texture surface by anisotropic etching porcessing the surface of the silicon semiconductor substrate on which the silicide layer is formed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
