| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface defect inspection device using an optical means for detecting small unevenness and even gentle unevenness in addition to a surface concentration defect at the same time. SOLUTION: The device comprises a lined illumination means for illuminating the surface of an inspected object from one direction, a first imaging means for detecting its reflected or diffused light, an optical system adjusting means for adjusting a relative position between each of the first imaging means and the observed surface of the inspected object and the lined illumination means using an image input means for acquiring the surface condition of the inspected object as a two dimensional image with sub-scanning, a second imaging means for detecting the distribution of the light reflected from the surface of the inspected object, a reflected light position computing means for computing the distribution of the reflected light for the obtained image and specifying the position of the reflected light, a moving position computing means for computing the moving position of the optical system adjusting means from the position of the reflected light, and a position control means for controlling the position of the optical system adjusting means to the moving position. The first imaging means is controlled to be at a fixed position with respect to the position of the reflected light at all times. COPYRIGHT: (C)2005,JPO&NCIPI
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