HIGH STRENGTH POLYCRYSTALLINE SILICON AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a polycrystalline silicon rod having high strength and excellent cracking resistance. SOLUTION: In the process of manufacturing a polycrystalline silicon rod from silanes as the source material by Siemens method, the surface temperature of the rod is controlled to the range of 950 to 1,010°C and the supply amount of the source material gas per unit surface area of the rod is controlled to the range of 3.5×10-4to 7.0×10-4mol/cm2min. The tensile strength of the rod in the longitudinal direction at ordinary temperature and at 800°C can be maintained to be≥90 MPa. COPYRIGHT: (C)2005,JPO&NCIPI