发明名称 Semiconductor device and method of manufacturing thereof
摘要 In a complete depletion type SOI transistor, the roll-off of a threshold value is suppressed, independently from the formation of an SOI film to be thinner. As for a semiconductor device (1), the impurity concentration in a channel formation portion (10) is implanted not uniformly along the length direction of a gate (2) in the complete depletion type silicon on insulation (SOI) transistor. In other words, high concentration regions (11) where impurity concentrations are higher than that at a central portion in the end parts of the channel formation portion (10) on the side of a source (4) and a drain (5).
申请公布号 US2004197970(A1) 申请公布日期 2004.10.07
申请号 US20040832562 申请日期 2004.04.26
申请人 KOMATSU HIROSHI 发明人 KOMATSU HIROSHI
分类号 H01L27/08;H01L21/336;H01L21/8234;H01L27/088;H01L29/786;(IPC1-7):H01L21/00;H01L21/84 主分类号 H01L27/08
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