发明名称 Ferroelectric capacitor and semiconductor device having a ferroelectric capacitor
摘要 A ferroelectric capacitor including a bottom electrode which has a projecting portion, a top electrode, a ferroelectric layer and a dielectric layer formed between the bottom electrode and the top electrode. The dielectric layer is formed on a peripheral area of the bottom electrode. The ferroelectric layer is formed on the dielectric layer and on the projecting portion of the bottom electrode. As a result, a damaged layer which is formed during an etching process occurs at the ineffective area of the ferroelectric capacitor.
申请公布号 US2004195603(A1) 申请公布日期 2004.10.07
申请号 US20040768185 申请日期 2004.02.02
申请人 ITO TOSHIO 发明人 ITO TOSHIO
分类号 H01L27/105;H01L21/02;H01L21/8246;H01L27/115;(IPC1-7):H01L29/76 主分类号 H01L27/105
代理机构 代理人
主权项
地址