HYBRID MICROCANTILEVER SENSORS

摘要

An apparatus and method for sensing chemical and/or biological analytes in a gaseous or liquid medium by monitoring the changes in impedance and thickness of a sensing element in the presence of the analyte is provided. Detecting means are provided to measure the change in the physical property of the sensing material to determine the presence and/or the amount of analyte present. An array of hybrid sensors dedicated to detecting a particular analyte which may be included in the medium, is also provided.