| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a coating rate of a vacuum coating process assisted with plasma, and to improve quality of a surface to be worked. <P>SOLUTION: A plurality of screen workpiece sets vertically oriented with intervals, one above the other, are simultaneously introduced in a lock chamber. Then they are simultaneously transported to a process station for simultaneous process, after that they are simultaneously delivered to the lock chamber. At least one process station comprises at least two substrate carriers stacked vertically in a line, with one above the other, and at least two operation openings that match with the at least two carriers for closing in sealing manner. A device for a vacuum plasma process communicates with the process station through the operation opening and comprises one transportation device. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
