| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning technology which can substantially reduce contamination of a workpiece. SOLUTION: An inside of a treatment chamber is coated with the same matter to the workpiece, or, with a matter of a diffusion coefficient larger than that of the matter. Then, a contaminated substance inside the treatment chamber is introduced into a coated film by heating the treatment chamber. The sufficiently contaminated coated-film is then removed from the treatment chamber. COPYRIGHT: (C)2005,JPO&NCIPI
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