PROCESSOR

摘要

A processor comprises a vessel (1) which holds an object (W) to be processed, an ultraviolet light generating means (41) for outputting an ultraviolet light (UV) into a radical-containing atmosphere (P) in the vessel (1), an ultraviolet light receiving means (42) for receiving an ultraviolet light (UV) passing through the atmosphere (P), and an analysis control means (43, 44) for determining the density of the radicals in the atmosphere (P) based on an output signal from the ultraviolet light receiving means (42) to control parameters of a process. This keeps the density of the radicals constant and improves the reproducibility of the process.