| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a persistent gas combustion treatment device capable of obtaining high CF<SB>4</SB>decomposition efficiency. <P>SOLUTION: This exhaust gas combustion treatment device comprises a burner device comprising a gas introduction conduit 3 having a heat storage part 1 for preheating a treated gas including a persistent component and an oxidant, a throttle part 5 for contracting a gas flow introduced from the gas introduction conduit 3, a means for supplying the fuel to the throttle part 5 and igniting the same, an expanded part 9 communicated with the throttle part 5, and an orifice 11 mounted on the expanded part 9 and having an opening area smaller than the throttle part 5. A space sufficient for oxidizing and decomposing the persistent component in the treating gas by the combustion of the fuel ignited at the throttle part 5, is formed between the expanded part 9 and the orifice 11. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
