| 摘要 |
PROBLEM TO BE SOLVED: To allow micro elementary analysis and average elemental analysis for a sample, by one X-ray analyzer. SOLUTION: A collimator plate movable perpendicularily in relation to an X-ray optical axis is arranged between a target 4 of an X-ray tube bulb 1 and the sample 2. The first collimator 32 having a hole 32H of a diameter of 2 mm, the second collimator 33 having a hole 33H of a diameter of 10 mm, and an X-ray condenser 34 are fitted in on the same straight line in the collimator plate 31. A rack 35 is fixed to the collimator plate 31, a pinion 36 is provided in a position meshed with teeth of the rack, the pinion 36 is rotated by a motor or the like, and the collimator plate 31 is thereby moved along a direction perpendicular to the X-ray optical axis. COPYRIGHT: (C)2005,JPO&NCIPI
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