POSITION CONTROLLING MECHANISM OF PELLICLE STRUCTURE FOR SECURING TRANSFER-PRECISION AND EXPOSING METHOD

摘要

PURPOSE: A position controlling mechanism of a pellicle structure and an exposing method are provided to secure transfer-precision by preventing the pellicle structure from being warped and vibrated using a position correcting part and an air-flow rectifying part. CONSTITUTION: A position controlling mechanism of a pellicle structure(2) includes a position correcting part and an air-flow rectifying part. The pellicle structure includes a pellicle layer(3). The position correcting part(10) is used for correcting a surface of the pellicle layer to a predetermined height with a measuring portion and a pressure controlling portion. The air-flow rectifying part(11) is used for rectifying the air-flow generated at a portion adjacent to the surface of the pellicle layer.