| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform carrying, setting and surface copying of a work under normal pressure, and perform carrying and surface copying of the work in an ultra-high vacuum with an automatic machine in flip-chip mounting, and to guarantee the parallelism suitable for the recognition by a camera of high magnifying power. <P>SOLUTION: This copying device is provided with a fixed stage 1 for holding a work A; an opposite stage 2 on which vacuum suction holes 6 are provided for holding a work B on the placing surface opposing the fixed stage 1; and a holder 3 which is brought into point-contact on the rear surface of the opposite stage 2 being contrary to the placing surface with a spherical surface portion 7, holds the opposite stage 2 via an O-ring 17 of an annular elastic body, and has a vacuum evacuation passage 8 opened to face the gap between the opposite stage 2 sealed with the O ring 17. The work B held on the opposite stage 2 is made to abut against the predetermined surface of the work A held on the fixed stage 1, and the abutting surface of the work B on the opposite stage 2 copies the work A so as to be parallel to the predetermined surface of the work A on the fixed stage 1, when the work B is pressed. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
