| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrooptical device equipped with a light reflection film which maintains excellent reflection characteristics of a silver type thin film just after deposition, an electronic appliance using the device and a method for manufacturing the device. <P>SOLUTION: In manufacturing a TFT array substrate 10 of a transflective electrooptical device, the silver type thin film 8 and a translucent film 15 such as aluminum with 50 nm or less film thickness are continuously formed on a surface of an upper layer side projection and recession forming film 7a. Subsequently the translucent film 15 and the silver type thin film 8 are etched via a resist mask 557 and the light reflection film 8a and a protective film 15a are left on specified regions. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
