| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cleaning device which is high in cleaning efficiency, capable of reducing the consumption of cleaning liquid, and decreasing a cleaning cost, and to provide a method of manufacturing a piezoelectric device by the use of the same. <P>SOLUTION: The cleaning device is equipped with a plurality of arms 22, 23, 24, and 25 arranged corresponding to a plurality of cleaning tanks 31, 41, 42, 43, and 44 which are arranged in order of cleaning processes along a guide means 21, holding means 34 which are provided to the arms to hold target objects of cleaning that are moved in depth directions of the cleaning tanks when the arms are moved to positions above the corresponding cleaning tanks, and freely openable lids 27 which are provided to the arms so as to block up openings of the cleaning tanks at positions above the holding means 34. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
