DIELECTRIC BARRIER DISCHARGE LAMP DEVICE AND ULTRAVIOLET IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a dielectric barrier discharge lamp device capable of uniformizing the distribution of excimer discharge along the tube axis direction by uniformly closely disposing an outside electrode along the tube axis direction of the outside surface of an arc tube; and to provide an ultraviolet irradiation device using it. SOLUTION: This dielectric barrier discharge lamp device EXL is equipped with: the outside electrode OE attached to the outside surface of an airtight vessel 1 of the arc tube LT provided with an inside electrode 2 enclosed in the airtight vessel 1 along its axial direction and excimer generation gas enclosed in the airtight vessel 1, and acting so as to generate dielectric barrier discharge in the arc tube LT by cooperation with the inside electrode 2; and support means SS1 and SS2 for bringing the airtight vessel 1 and the outside electrode OE into press contact with each other by making spring force act on at least one of both ends of the arc tube LT to support the arc tube LT. COPYRIGHT: (C)2005,JPO&NCIPI