| 摘要 |
PROBLEM TO BE SOLVED: To maintain a right posture and high vacuum even if a local vacuum pad is separated from a specimen when an outermost circumference of the specimen is measured. SOLUTION: An electron beam irradiation device is provided with an arrangement means by which a flat satellite stage 17 installed at a circumference or at a part of the circumference of a workpiece 3 with its height equalized to that of the surface of the workpiece, and a sealing means to seal a gap between the satellite stage 17 and the workpiece 3 in close contact. By this, in a partial vacuum device, working can be carried out up to the outer peripheral part of the workpiece 3 with a posture of a static pressure floating pad maintained while the vacuum state of the static pressure floating pad is maintained. COPYRIGHT: (C)2005,JPO&NCIPI
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