| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a probe for scanning probe microscope, characterized by growing a minute tip projections (hereinbelow, also referred to as "nanopillars") on the tip of the probe for the scanning probe microscope (SPM). SOLUTION: The method of manufacturing the probe for scanning probe microscope is characterised in that a microcrystal nanopillar, comprising the base material is grown on the tip of the probe used in the scanning probe microscope by the movement of atoms from the heated base material substrate. For example, the probe is a silicon single crystal, and silicon or germanium is used as the raw material substrate, to make the nanopillar of silicon or germanium grown. COPYRIGHT: (C)2005,JPO&NCIPI
|
