| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that since a mirror optical system used in an EUV aligner has the reflectivity of about 70% with respect to EUV light, it absorbs EUV light, followed by a large deformation. SOLUTION: The optical system includes at least one optical element in an internal space and guides the light from a light source to a prescribed surface. The optical system comprises a measuring system for measuring a surface profile of the optical element, and a temperature controlling section for controlling the temperature of the optical system based on the results from the measuring system. COPYRIGHT: (C)2005,JPO&NCIPI
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