| 摘要 |
PROBLEM TO BE SOLVED: To reduce influences of a plurality of wirings 25, 26 of discharge electrodes 23, 24 on discharge and to concentrate the discharge on a prescribed discharge region between the discharge electrodes 23, 24. SOLUTION: A first insulating layer 31 and a second insulating layer 32 are laminated in order on a glass substrate 21, and a main through hole 34 which penetrates vertically respective insulating layers 31, 32 is formed. A first discharge electrode 23 is installed at the bottom of the main through hole 34, and a second discharge electrode 24 is installed on the top of the second insulating layer. Furthermore, first wiring 25 is provided between the first insulating layer 31 and the glass substrate 21, and second wiring 26 is provided between the first insulating layer 31 and the second insulating layer 32. Then, while the first wiring 25 is connected directly to the first discharge electrode 23, the second wiring 26 is connected to the second discharge electrode 24 through a second connecting part 28. COPYRIGHT: (C)2005,JPO&NCIPI
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