| 发明名称 |
Guard for electrostatic chuck |
| 摘要 |
A guard for an electrostatic chuck includes a ceramic annulus that has an inner surface shaped to fit around a circumference of the electrostatic chuck, and an outer surface having (i) a top portion with a recessed trench and (ii) a side portion. A metal coating is provided on the top portion of the outer surface.
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| 申请公布号 |
US2004196613(A1) |
申请公布日期 |
2004.10.07 |
| 申请号 |
US20030406889 |
申请日期 |
2003.04.03 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
ZHENG HUI;TSAI KENNETH;WANG HONG;HE YONGXIANG;GARCIA JESUS G.;DEYO DANIEL M. |
| 分类号 |
H01L21/683;H01L21/687;(IPC1-7):H02H1/00 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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