| 摘要 |
<p>A main sensor electrode portion 3 and a reference sensor electrode portion 4 are patterned and deposited on the surface of a support 10, and a lead portion 4b of the main sensor electrode portion 4 is extended to an upper end of the support through a notch passage 11 of the main sensor electrode portion 3 so as to form a terminal portion 4a. A part of the main sensor electrode portion 3 is extended to the upper end of the support 10 to form a terminal portion 3a. An insulating film 12 is deposited on the entire surface of the support to cover both of these sensor electrode portions 3, 4.</p> |
