PHOTODIODE ARRAY AND PRODUCTION METHOD THEREOF, AND RADIATION DETECTOR

摘要

A photodiode array (1) is provided with an n-type silicon substrate (3). A plurality of photodiodes (4) are formed in an array form on the surface opposite to the surface, onto which a light (L) to be detected enters, of the n-type silicon substrate (3). An area corresponding to a photodiode (4)-formed area on the light-to-be-detected (L)-incident surface of the n-type silicon substrate (3) is at least coated to provide a resin film (6) that transmits the light to be detected (L).