| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor device including an analog circuit having resistors consisting of a semiconductor material, wherein stability of resistances of the resistors is improved and a chip area is reduced. <P>SOLUTION: A plurality of resistors 9 are formed on a LOCOS oxide film 3 at a resistors forming region. An NSG film 23 and and a BPSG film 25 are formed on an entire face of a semiconductor substrate 1, and an electrode pad 31 is formed on the BPSG film 25 at a region including the forming region of the resistors 9. As the resistors 9 are arranged under the electrode pad 31, infiltration of impurity ions, electric charges, moisture, hydrogen or the like to the resistors 9 from a upper layer side than the electrode pad 31 is prevented, and stability of the resistance values of the resistors 9 is improved. In addition, as layout areas only for the resistors 9 are not required, the chip area is reduced. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
