| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device by which a proper light exposure can be controlled according to the concentration of oxygen, water and the like in a laser light path. <P>SOLUTION: A mask is illuminated by light from a light source and an object to be exposed is exposed to light from the mask by the exposure device. The exposure device has an oxygen concentration detecting means which detects the concentration of oxygen in the light path from the light source to the object to be exposed, a water concentration detecting means which detects the concentration of water in the above light path and a control means which controls the light exposure for irradiating the object to be exposed according to results of detection by the oxygen concentration detecting means and the water concentration detecting means. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
