| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical deflection element capable of reducing applied voltage and preferably reducing the variation in the applied voltage and warping while suppressing the loss of propagation of light and an optical device using the same. <P>SOLUTION: A Cr layer 21 is formed over the entire lower surface of a semiconductive substrate 8 composed of STO doped with Nb. a PLZT films 22, a PZT films 23 and a PLZT films 9 are successively deposited by epitaxial growth on the substrate 8. A plurality of Cr electrodes 10 of a triangular plane shape are formed on the PLZT films. Take-out sections 24 are provided on the side faces of the Cr layer 21. Voltage from a power source V is impressed between the electrodes 10 and the take-out sections 24. On the occasion of deflection with such optical deflection element, the portion functioning as a lower electrode not only functions as the substrate 8 but the Cr layer 21 functions as the lower electrode as well. The voltage to be impressed between the respective electrodes 10 and the take-out sections can therefore be reduced. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
