| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma spectrophotometer which measures a plasma spectroscopic image at a high accuracy by removing influences from outside a measuring object area. SOLUTION: The spectrophotometer is provided with: a condensing optical system (1) for collecting lights of plasma emission; a first view field limiting means (2) disposed near the focus of the condensing optical system (1); an anisotropic condensing optical system (3) for diverging the plasma emission passed through the first view filed limiting means in a first direction but condensing it in a second direction perpendicular to the first direction; an anisotropic optical filter (4) disposed behind the anisotropic condensing optical system, having a pass wavelength differing in the first direction, depending on the position but fixed, in the second direction irrespective of the position; and a two-dimensional imaging device (5) for converting lights passed through the anisotropic optical filter to electric signals. COPYRIGHT: (C)2005,JPO&NCIPI
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