| 摘要 |
PROBLEM TO BE SOLVED: To improve the workability in maintenance by exposing a control box to operate the control box while visually confirming the same in an installation state (including an operation time) of a plurality of FFUs attached to divide a blowout face in a zoned state to allow the cleaning air to flow down from the same plane as a ceiling face of a room, at a ceiling side of an air circulation type clean room. SOLUTION: This chemical filter X attached to a suction side of a fan 3 for every FFU 5, has a frame 1 having a downward approximately projecting cross-sectional shape, a dry filter 2 for eliminating a harmful chemical substance is incorporated in a wide cross-sectional part 11 of the frame 1, a narrow cross-sectional part 12 is hollowed out to form a duct, and a lower face of the frame 1 at a duct side is positioned oppositely to a suction port 31 of the fan 3. In the setting structure of this chemical filter, the control box 51 of the FFU 5 is exposed to an installation free space S defined by the narrow cross-sectional part 12. COPYRIGHT: (C)2005,JPO&NCIPI
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