| 摘要 |
PROBLEM TO BE SOLVED: To provide a massflow controller capable of safely closing a flow path without allowing flow of excessive amount of fluid even when abnormality occurs. SOLUTION: The massflow controller comprises a pressure sensor 7b for measuring pressure Pb of fluid running in a flow path 2, a pressure control valve 4 for controlling the pressure Pb, a flow sensor 5 for measuring flow rate F of the fluid, a flow control valve 6 for controlling the flow rate F, and a control part 8 having a safety stop function for monitoring the flow of the fluid by use of outputs Spa, Sf of the pressure sensor 7b and the flow sensor 5 and, when abnormality occurs in the flow, stopping the flow of the fluid by closing the control valves 4, 6, as well as stably controlling the flow of the fluid by controlling the flow control valve 6 by use of the output of the flow sensor 5 while controlling the pressure control valve 4 by use of the output Spb of the pressure sensor 7b. COPYRIGHT: (C)2005,JPO&NCIPI
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