发明名称 CONTINUOUS TREATMENT APPARATUS AND CONTINUOUS TREATMENT METHOD
摘要 PROBLEM TO BE SOLVED: To provide a continuous treatment apparatus and a continuous treatment method by which a plurality of kinds of treatments are continuously and efficiently carried out on the surface of a material to be treated, the combination of the plurality of kinds of the treatments is changed or added and the continuous treatment is smoothly carried out. SOLUTION: The continuous treatment apparatus 10 for continuously treating the plurality of kinds of the treatments on the surface 17 of the material to be treated 14 is provided with a material-to-be-treated transporting part 20 for holding and transporting the material 14 to be treated in the transporting direction of the material 14 to be treated and the plurality of kinds of treatment units 51, 52, 53, 54, 55, 56 and 57 arranged in line in the transporting direction of the material 14 to be treated and successively carrying out respective different treatments on the material 14 to be treated under atmospheric pressure or a pressure near the atmospheric pressure. The combination of the plurality of kinds of treatment units is freely changed or added. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004277238(A) 申请公布日期 2004.10.07
申请号 JP20030072230 申请日期 2003.03.17
申请人 SEIKO EPSON CORP 发明人 ASUKE SHINTARO;MORI YOSHIAKI
分类号 G02F1/13;B65G49/06;C03C17/25;C03C23/00;H01L21/02;(IPC1-7):C03C17/25 主分类号 G02F1/13
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