发明名称 |
System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system |
摘要 |
A method of mixing two or more chemicals such as for a CMP system. The method includes delivering a first chemical to a first inlet port of a point of use mixer at a first flow rate, delivering a second chemical to a second inlet port of the point of use mixer at a second flow rate, controlling the flow of the first and second chemicals into the mixer upon demand for a mixture of the first and second chemicals and balancing the flow of the first and second chemicals into the mixer. The mixture can also be output such as to a CMP process. A system for mixing two or more chemicals is also described.
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申请公布号 |
US2004199293(A1) |
申请公布日期 |
2004.10.07 |
申请号 |
US20040828026 |
申请日期 |
2004.04.19 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
PHAM XUYEN;NGUYEN TUAN;QUACH VIEN;ZHOU REN |
分类号 |
B24B57/02;B24B37/00;G05D11/13;H01L21/304;(IPC1-7):G05B21/00 |
主分类号 |
B24B57/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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