| 发明名称 |
Linear polishing sheet with window |
| 摘要 |
A polishing article for chemical mechanical polishing. The polishing article includes a generally elongated polishing sheet with a polishing surface. The polishing article is formed from a material that is substantially opaque, and has a discrete region extending substantially the length of the polishing sheet that is at least semi-transparent.
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| 申请公布号 |
US2004198185(A1) |
申请公布日期 |
2004.10.07 |
| 申请号 |
US20040814405 |
申请日期 |
2004.03.31 |
| 申请人 |
REDEKER FRED C.;BIRANG MANOOCHER;LI SHIJIAN;SOMEKH SASSON |
发明人 |
REDEKER FRED C.;BIRANG MANOOCHER;LI SHIJIAN;SOMEKH SASSON |
| 分类号 |
B24B21/04;B24B21/18;B24B37/04;B24B49/04;B24B49/12;H01L21/304;H01L21/306;H01L21/66;(IPC1-7):B24B49/00;B24B51/00;B24B5/00 |
主分类号 |
B24B21/04 |
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