发明名称 RADIATION DETECTING DEVICE AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent the warping of a radiation detecting panel caused in heat displacement. <P>SOLUTION: A radiation detecting device has a sensor panel 100 having a plurality of photoelectric conversion elements formed on one surface of a supporting substrate 101. A moisture-proofing protective layer 115 is laminated on the surface of the sensor panel 100 on the photoelectric conversion elements side, and a warping correcting layer 114 is laminated on the other surface of the panel 100. In addition, both of the moisture-proofing protective layer 115 and the warping correcting layer 114 are composed of resin films having directions of draw or directions of extrusion and are stuck to the panel 100 so that the directions of draw or extrusion of the resin films may become the same. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2004281439(A) 申请公布日期 2004.10.07
申请号 JP20030066728 申请日期 2003.03.12
申请人 CANON INC 发明人 NAGANO KAZUMI;TAMURA TOMOYUKI;OKADA SATOSHI;TAKENAKA KATSURO
分类号 G01T1/20;G01T1/24;H01L27/14;H01L27/146;H01L31/09;H04N5/32;(IPC1-7):H01L27/14 主分类号 G01T1/20
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