| 摘要 |
PROBLEM TO BE SOLVED: To easily keep an interval between facing electrodes. SOLUTION: A holding member 3 holds the flexible thin film 4 so that the flexible thin film 4 can flex. A reflection film 6 is fitted to the flexible thin film. A film-side counter electrode 5a extends along the flexible thin film 4. A base part 7 faces the holding member 3. A base-part-side counter electrode 8, provided to the base part 7, faces the film-side counter electrode 5a. Adhesive spacer members 13 and 14 are sandwiched in between the holding member 3 and the base part 7, to bond the holding member 3 to the base part 7; while they keep a prescribed interval between the holding member 3 and the base part 7 so that the interval between the film-side counter electrode 5a and the base-part-side counter electrode 8 is kept to a prescribed value. The flexible thin film 4 flexes, according to the electrostatic force acting on the film-side counter electrode 5a and the base-part-side counter electrode 8, and the reflection film 6 deforms according to the flexure of the flexible thin film 4. COPYRIGHT: (C)2005,JPO&NCIPI
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