发明名称 |
Ceramic microelectromechanical structure |
摘要 |
A microelectromechanical structure and method is disclosed. A ceramic substrate preferably is formed from low temperature co-fired ceramic sheets. A low loss photodefinable dielectric planarizing layer is formed over one surface of the ceramic substrate. This layer can e a sacrificial layer or a subsequent sacrificial layer added. A photodefined conductor is printed over the low loss dielectric planarizing layer and formed with the sacrificial layer into a structural circuit component. In one aspect of the invention, a switch is formed with a biasing actuator and deflectable member formed over the biasing actuator and moveable into open and closed circuit positions.
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申请公布号 |
US2004198231(A1) |
申请公布日期 |
2004.10.07 |
申请号 |
US20040827004 |
申请日期 |
2004.04.19 |
申请人 |
HARRIS CORPORATION |
发明人 |
NEWTON CHARLES M.;RUMPF RAYMOND C.;GAMLEN CAROL |
分类号 |
B81B3/00;H01H59/00;H01P1/12;H05K1/09;H05K3/02;(IPC1-7):H01L21/00;H04B1/06 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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