发明名称 |
Method and apparatus for vertical transfer of semiconductor substrates between cleaning modules |
摘要 |
A substrate handler is provided comprising a carriage positionable along a first axis of motion, a first substrate gripper coupled to the carriage and positionable relative to the carriage along a second axis of motion oriented substantially perpendicular to the first axis of motion, and a second substrate gripper coupled to the carriage and positionable relative to the carriage along a third axis of motion oriented substantially parallel to the second axis of motion, wherein the second gripper is independently movable relative to the first gripper.
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申请公布号 |
US2004197179(A1) |
申请公布日期 |
2004.10.07 |
申请号 |
US20030408036 |
申请日期 |
2003.04.03 |
申请人 |
APPLIED MATERIALS INC |
发明人 |
ACHKIRE YOUNES;MAROHL DAN;KARUPPIAH LAKSHMANAN |
分类号 |
B65G49/07;H01L21/00;H01L21/677;H01L21/687;(IPC1-7):B66F1/00 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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