发明名称 OPTICAL ELEMENT, OPTICAL SYSTEM, LASER DEVICE, EXPOSURE DEVICE, MASK TESTING DEVICE, AND HIGH POLYMER CRYSTAL PROCESSING DEVICE
摘要 The directions of the generatrices of cylindrical lenses (11a, 11b) are orthogonal to the optical axis and orthogonal to each other. Thereby, an optical system using a combination of the cylindrical lenses (11a, 11b) is capable of performing the same optical action as a spherical lens does. Since each lens is a cylindrical lens, it has a feature that deviation of the optical axis will not occur even when it is moved in the direction of the generatrix. For example, in the case where damage to the lens becomes noticeable, the lens is moved in the direction of the generatrix (in the direction of arrow) by an unillustrated driving mechanism, e.g., a micrometer-equipped stage, to use the unused portion, thereby prolonging the life of the laser device.
申请公布号 WO2004086121(A1) 申请公布日期 2004.10.07
申请号 WO2004JP03820 申请日期 2004.03.22
申请人 NIKON CORPORATION;MIWA, SATOSHI 发明人 MIWA, SATOSHI
分类号 B23K26/00;G02B27/00;G02F1/35;G02F1/37;G03F7/20;H01L21/027 主分类号 B23K26/00
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