SUBSTRATE TESTING SYSTEM, SUBSTRATE TESTING METHOD, AND SUBSTRATE TESTING DEVICE FOR TESTING SUBSTRATE AFTER LITHOGRAPHY IN LIQUID CRYSTAL DISPLAY MANUFACTURE OR SEMICONDUCTOR CIRCUIT MANUFACTURE

摘要

PURPOSE: A substrate testing system, a substrate testing method, and a substrate testing device are provided to efficiently operate a test for a large range and a test for a small range in a substrate to be tested. CONSTITUTION: A substrate testing system(10) comprises a first testing device(11) performing macro tests for plural substrates(14(1)-14(n)) to be tested and outputting information about defects of the substrates to be tested, a memory device(12) storing the information about defects outputted from the first testing device of respective substrates, and a second testing device(13) performing tests for specific parts of the substrates to be tested. The second testing device performs tests only for the substrates without defects.