发明名称 METHOD FOR THE PLASMA CLEANING OF THE SURFACE OF A MATERIAL COATED WITH AN ORGANIC SUBSTANCE AND THE INSTALLATION FOR CARRYING OUT SAID METHOD
摘要 Cleaning of the surface of a material coated with an organic substance involves introducing the material into a treatment enclosure with an internal pressure of 10 mbar-1 bar and which is fed by a gaseous flow comprising at least 90 volume % oxygen; and generating a plasma by electric discharge between the material surface and an electrode covered with a dielectric, in order to decompose the organic substance under the action of the free O radicals thus produced. An Independent claim is also included for an installation for implementing the cleaning operation.
申请公布号 KR20040084925(A) 申请公布日期 2004.10.06
申请号 KR20047012864 申请日期 2003.02.19
申请人 发明人
分类号 C23G5/00;H05H1/24;B08B7/00;H01J37/32 主分类号 C23G5/00
代理机构 代理人
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