SEMICONDUCTOR CARRIER SYSTEM INCLUDING ALIGNMENT INDICTOR TO STOP MOVING BODY AT SENSING POINT

摘要

PURPOSE: A semiconductor carrier system including an alignment indicator is provided to stop a moving body at a sensing point of the alignment indicator by installing the alignment indicator at a load port. CONSTITUTION: A guide rail(10) is installed on an upper part of a semiconductor process line. A sensing unit is installed at the guide rail. A moving body(11) is moved to the left and the right directions along the guide rail and is stopped at a center of the sensing unit. A gripper(13) is installed at a bottom part of the moving body by a plat belt and includes a hanger ring. A foup(14) includes a projection coupled to the hanger ring of the gripper. An alignment indictor is installed at a load port in order to load the foup into a center of the load port and is sensed by the sensing unit.