发明名称 |
METHOD FOR PRODUCING MICROMECHANICAL AND MICRO-OPTIC COMPONENTS CONSISTING OF GLASS-TYPE MATERIALS |
摘要 |
<p>What is proposed here is a method of structuring surfaces of glass-type materials and variants of this method, comprising the following steps of operation: providing a semiconductor substrate, structuring, with the formation of recesses, of at least one surface of the semiconductor substrate, providing a substrate of glass-type material, joining the semiconductor substrate to the glass-type substrate, with a structured surface of the semiconductor substrate being joined to a surface of the glass-type surface in an at least partly overlapping relationship, and heating the substrates so bonded by annealing in a way so as to induce an inflow of the glass-type material into the recesses of the structured surface of the semiconductor substrate. The variants of the method are particularly well suitable for the manufacture of micro-optical lenses and micro-mechanical components such as micro-relays or micro-valves.</p> |
申请公布号 |
EP1154959(B1) |
申请公布日期 |
2004.10.06 |
申请号 |
EP20000977563 |
申请日期 |
2000.11.23 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DERANGEWANDTEN FORSCHUNG E.V. |
发明人 |
QUENZER, HANS-JOACHIM;MERZ, PETER;SCHULZ, ARNE, VEIT |
分类号 |
G02B3/00;C03B11/00;C03B11/08;C03B23/02;C03B23/025;C03B23/203;C03C19/00;(IPC1-7):C03B23/025;G03B7/00;H02N1/00;B81B7/00 |
主分类号 |
G02B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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