RF MATCHING DEVICE AND MATCHING METHOD THEREOF, IN WHICH IMPEDANCE IS VARIED TO MATCH IMPEDANCE

摘要

PURPOSE: An RF matching device and a matching method thereof are provided to enhance the productivity by setting automatically an initial impedance value on the basis of a matching impedance value of a total process. CONSTITUTION: A variable impedance unit(210) is connected between an output terminal of an RF generator and an input terminal of a chamber in order to vary an impedance value. A detection unit(230) detects an output signal of the RF generator and a reflective wave signal according to the output signal. An impedance setup unit(240) detects a matching impedance value for minimizing a generation ratio of the reflective signals from the detected signals of the detection unit. A variable impedance control unit(250) controls an operation of the variable impedance unit in order to vary the impedance value of the variable impedance unit.