MOTOR DEVICE HAVING FUNCTION FOR SENSING STATUS OF MOTOR OPERATION TO PREVENT STOPPAGE OF MOTOR

摘要

PURPOSE: A motor device having function for sensing status of a motor operation is provided to prevent stoppage of the motor during semiconductor manufacture process. CONSTITUTION: A motor device comprises a motor(10); a driving unit(20) for driving the motor; a sensing unit(30) mounted on the motor for sensing the status of operation in real time; and a controller(40) for comparing a detected signal with a reference data and outputting a driving signal according to the comparing result to the driving unit.