END POINT MONITORING SYSTEM USING ACOUSTIC EMISSION SENSOR, BLUETOOTH TRANSMISSION MODULE, AND BLUETOOTH RECEPTION MODULE

摘要

PURPOSE: An end point monitoring system using an AE(Acoustic Emission) signal and a bluetooth in a CMP process is provided to detect an end point by using an AE sensor, a bluetooth transmission module, and a bluetooth reception module. CONSTITUTION: An AE sensor(1) is used for detecting an AE signal. An AE signal processing unit(2) performs an RMS(Root Mean Square) process by amplifying and filtering an output signal of the AE sensor and convert the output signal of the AE sensor to a digital signal. A bluetooth transmission module(3) is used for transmitting a bluetooth signal. A bluetooth reception module(8) is used for receiving the bluetooth signal. A computer(9) is used for detecting an end point by analyzing, diagnosing, and monitoring an output signal of the bluetooth reception module. A CMP controller(10) is used for controlling a CMP apparatus according to a command signal of the computer.