| 摘要 |
A particle inspection device includes a feeder configured to drop a particle through an image area (31,32), a reflector (13,14) configured to provide a reflected view of the particle in the image area (31,32), and an image capturing device (15,16) configured to capture an image of the particle in the image area (31,32) such that the image includes at least a direct view (102) of the particle and the reflected view of the particle. In addition, a method for inspecting a particle includes dropping the particle through an image area (31,32), providing a reflected view of the particle in the image area (31,32) using a reflector (13,14), and capturing an image of the particle in the image area (31,32) using an image capturing device (15,16) so that the image includes a direct view of the particle and the reflected view of the particle. <IMAGE>
|
