MASS FLOW CONTROLLER IN WHICH MAXIMUM AMOUNT OF MASS FLOW IS ADJUSTABLE

摘要

PURPOSE: A mass flow controller is provided to adjust an amount of mass flow by using first and second control valves. CONSTITUTION: A mass flow controller(200) is connected to a fluid pipe for feeding fluid in order to adjust an amount of mass flow. The mass flow controller(200) includes a base(210), a mass flow sensor(230), a first control valve(250), a valve controller(260) and a second control valve(270). The base(210) is connected to the fluid pipe and has a long fluid path(212) extending by passing through the base(210), a fluid inlet(214) for introducing fluid into the fluid path, and a fluid outlet(216) for discharging fluid from the long fluid path(212) to the fluid pipe. The mass flow sensor(230) is connected to the long fluid path(212).