APPARATUS FOR MANUFACTURING THIN FILM BY MOUNTING SHUTTER UNIT INSIDE DEPOSITION CHAMBER

摘要

PURPOSE: An apparatus for manufacturing a thin film is provided to obtain a uniform coated large-scale substrate and secure uniformity of a thin film in-situ during depositing process by mounting a shutter unit inside a deposition chamber. CONSTITUTION: An apparatus for manufacturing a thin film comprises an upper chamber(10); a lower chamber(30); and a shutter unit(40). A substrate loading gate valve(14) and a substrate unloading gate valve(16) are connected to the both sides of the upper chamber and a substrate to be treated is transferred and loaded to the upper chamber. A sidewall(20) having a window is interposed between the upper chamber and the lower chamber and a linear evaporation source(32) is installed into the lower chamber. The shutter unit is mounted at least one of lateral walls for adjusting area of the window.